Now I'm looking for my personal purposes mini-ITX board supporting virtualization to use it for pfSense. I see Atom's everywhere ;/ that has no VT-x support.
Here are Atoms with VT-x support:
http://ark.intel.com/MySearch.aspx?VTX=true
But I cannot find them on the market.
Maybe you haven't told us all your constraints. In about 5 minutes and google search for "mini-ITX z530" (z530 is one of the CPUs on your list) I had over 4000 hits and the second one lead me to http://emea.kontron.com/products/boards+and+mezzanines/embedded+motherboards/miniitx+motherboards/. I suspect a bit of poking around with the links (exchange location or contact us) will get you to details of a sales office prepared to answer questions about a particular product. I have no experience with kontron equipment. I'm just pointing you to a possible source for what you seem to be looking for.
Another option would be to get a mini-ITX motherboard without CPU, then add your own CPU (Intel or AMD) which you have selected to have the virtualization technology you desire.